Abstract
We designed high-frequency-carrier-type thin-film sensors to obtain high sensitivity. We consider the relation between the sensor form and the sensor to be characteristic. When the sensor area was fixed to 5 mm × 5 mm, and the sensor interval was 30 μm, the width of the sensor with the best sensitivity was set to 200-400 μm. We fabricated a meander-type sensor element, and compared the calculated and measured result. It was found that-they mostly in agreed.
