Journal of the Magnetics Society of Japan
Online ISSN : 1880-4004
Print ISSN : 0285-0192
ISSN-L : 0285-0192
Measurement and High-Frequency Devices
Examination of a Force Sensor Using a TbFeCo Giant Magnetostrictive Thin Film
Y. Torii, M. Fujishige, N. Aoyagi, H. Wakiwaka, T. Kiyomiya, Y. Matsuo, Y. Yamada, M. Makimura
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Keywords: giant magnetostrictive material, thin film, force sensor, meander coil
JOURNAL OPEN ACCESS

2005 Volume 29 Issue 4 Pages 482-485

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Abstract
Giant magnetostrictive material (GMM) has large magnetostriction, and has been successfully used in many actuators and sensors. Currently, practical microactuators and micro-sensors are widely anticipated in the industry. In this study, the effect of adding Co to Tb-Fe GMM thin film and the influence of heat-treatment were examined. GMM thin film was used in a force sensor. GMM thin film with a Co ratio of 25.5 at% and annealing temperature of 300°C has 1200 ppm magnetostriction at 80 kA/m. The characteristics of a force sensor using a GMM thin film with a relative permeability of 210 are also examined.
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© 2005 by The Magnetics Society of Japan
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