Journal of the Magnetics Society of Japan
Online ISSN : 1880-4004
Print ISSN : 0285-0192
ISSN-L : 0285-0192
Measurement and High-Frequency Devices
Enhancement of High-Frequency-Carrier Type Magnetic Field Sensors by Controlling the Annealing Temperature
Y. Murayama, T. Ozawa, N. Horikoshi, S. Yabukami, K. Ishiyama, K. I. Arai
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Keywords: high sensitivity, high-frequency-carrier type thin film magnetic field sensor, annealing, noise level
JOURNAL OPEN ACCESS

2006 Volume 30 Issue 2 Pages 237-242

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Abstract
We designed high-frequency-carrier type thin-film sensors to obtain high impedance change by controlling the annealing temperature, and investigated the relationships between the noise level, magnetic permeability, and domain structure. Meander-type sensor elements were fabricated, and a magnetic field resolution of 3.4 x 10-8 Oe/Hz1/2 at 501 kHz was obtained.
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© 2006 by The Magnetics Society of Japan
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