Abstract
This paper describes a cantilevered magnetic actuator driven in a low magnetic field. Magnetostriction was used as a driving principle in this study. We studied the displacement of the cantilevered magnetic actuator by the magnetostriction. FeSiB with the thickness of 0.7 μm was used as a magnetostrictive thin film. The dimensions of the cantilever were 1 mm×5 mm. We used polyimide films with thicknesses of 30 μm and 7.5 μm and Ni foil with a thickness of 5 mm as substrates. As a result, the cantilevered magnetic actuator was able to function in a magnetic field of 10 kA/m. The maximum displacement of the cantilevered magnetic actuator was about 40 μm with an Ni substrate.
