Evaluation of RF Magnetic Thin Film Noise Suppressor Integrated onto an Operating LSI Chip

T. Fukushima; S. Koya; H. Ono; N. Masuda; M. Yamaguchi

doi:10.3379/jmsjmag.30.531

Contributed Paper

Evaluation of RF Magnetic Thin Film Noise Suppressor Integrated onto an Operating LSI Chip

T. Fukushima, S. Koya, H. Ono, N. Masuda, M. Yamaguchi

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Keywords: LSI chip, Resin packaging, Integration, Magnetic field probe, Electromagnetic noise, Probe output, Spectrum

JOURNAL OPEN ACCESS

2006 Volume 30 Issue 6_1 Pages 531-534

DOI https://doi.org/10.3379/jmsjmag.30.531

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Abstract

This paper discusses the basic performance of a soft magnetic film as the RF electromagnetic noise suppressor and its application to a LSI chip. The 1.0μm-thick soft magnetic CoNbZr film has been integrated onto a bare LSI chip by RF sputtering method. Magnetic field above the chip has been evaluated by a planar shielded-loop probe from 1 to 2 GHz. The maximum suppression observed was 37.8 dB at 1.12 GHz.

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