Abstract
The magnetic contrast (Type I) in a differential detection system in the scanning electron microscope is measured and evaluated. The differential detection system consists of symmetrically placed two detectors and a differential amplifier. The output of a detector in the differential detection system is greater (2.6 times with YFeO3 platelets and 2.3 times with FeCo anodic oxide films in measurement) than that in a single-ended system, due to a balanced electric field between the two detectors and a specimen. The differential amplitude of the two detectors doubles the output of the one detector in the differential detection system.
