Abstract
Magnetoresistive characteristics of Fe-Ni alloy films (MR films) prepared on glass substrates, Ti films or insulation films, were examined under various preparation conditions to induce uniaxial magnetic anisotropy in a desired direction of the films, taking into consideration of magnetostatic and magnetoelastic energies.
MR films prepared under the following conditions show uniaxial magnetic anisotropy without dispersion. The conditions are as follows:
1) Thickness of MR films: < 2000 Å,
2) Surface roughness of substrates: < 50 Å,
3) Composition of evaporation source: 83Ni-17Fe (at.%), and
4) Surface condition of Ti films: O2 plasma oxidation prevents Ti from diffusion into Fe-Ni alloy films.
