Abstract
Strain and anisotropy field profiles in triply implanted layers have been determined by means of X-ray double crystal diffraction and ferromagnetic resonance measurements. Strain profiles are determined by kinematical theory of X-ray diffraction. So far kinematical theory has been widely used for investigating strain profile with less consideration of its applicability to implanted layer. Kinematical expression has been rigorously verified using the Riemann's method, based on Takagi's equation of X-ray dynamical theory. Anisotropy field profiles are determined by solving spinwave equation. Inside the double implanted layers with neon ions, anisotropy field change is proportional to strain. Hydrogen ion addingly implanted, there appears the region with large anisotropy field change near the projection range of hydrogen.
