2018 Volume 18 Pages 9-12
Heavy ion (Fe3+) irradiation or gamma-ray irradiation of silicon carbide (β-SiC) was done to evaluate the radiation effect on hydrogen isotope retention in SiC. Thereafter, 1 keV D2+ implantation or D2 gas exposure was performed, and their D retentions were evaluated by thermal desorption spectroscopy (TDS). The D2 TDS spectra consisted of two desorption stages, namely the desorption of D bound to Si as the Si-D bond and C as the C-D bond. The D retention for Fe3+ irradiated SiC at the lowest D2+ fluence of 0.1 × 1022 D+ m-2 was lower than that for unirradiated SiC. It was expected that the displaced C atoms would be accumulated near the surface region by Fe3+ irradiation, leading to their dynamic desorption in methane molecules. For gamma-ray irradiation, C or Si with dangling bonds were formed, which enhanced D trapping. It was concluded that the collision process caused during Fe3+ irradiation induced the dissociation of SiC matrix and C aggregates near the surface region, but the electron excitation by gamma-ray irradiation dissociated the single Si-C bond and the quick D trapping by dangling bonds enhanced D retention in SiC.