Abstract
A novel external scanning proton microprobe system has been developed at JAERI Takasaki. The system enables multi-elemental mapping of samples in-air environment with spatial resolution of 1 μm. The elemental analysis is based on Particle Induced X-ray Emission (PIXE) and Particle Induced Gamma-ray Emission (PIGE) techniques. Sodium and heavier elements can be analyzed by the former method while light elements such as fluorine and boron can be detected by the latter. This system has already been targeted for a wide variety of applications in fields such as biomedical research, dental study, environmental science, and geology.
