Meeting Abstracts of the Physical Society of Japan
Online ISSN : 2189-0803
ISSN-L : 2189-0803
52.1.4
Session ID : 29a-YX-9
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29a-YX-9 Formation of TiN Phase by Plasma Source Ion Implantation Technique
M Yatsuzuka, S Miki, Y Hashimoto, T Yamasaki, H Uchida, S Nobuhara
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© 1997 The Physical Society of Japan
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Meeting Abstracts of the Physical Society of Japan

Meeting Abstracts of the Physical Society of Japan

Meeting Abstracts of the Physical Society of Japan

Meeting Abstracts of the Physical Society of Japan

Meeting Abstracts of the Physical Society of Japan

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