30p-K-6 The influence of the electronic stopping power on the correlation between lateral and longitudinal straggling of ions implanted into a crystalline target

Y. HADA; L. THOME; H. SAITO; S.T NAKAGAWA

doi:10.11316/jpsgaiyo.53.1.4.0_749_4

Meeting Abstracts of the Physical Society of Japan

Online ISSN : 2189-0803
ISSN-L : 2189-0803

53.1.4

DOI https://doi.org/10.11316/jpsgaiyo.53.1.4.0_749_4

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30p-K-6 The influence of the electronic stopping power on the correlation between lateral and longitudinal straggling of ions implanted into a crystalline target

Y. HADA, L. THOME, H. SAITO, S.T NAKAGAWA

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