Meeting Abstracts of the Physical Society of Japan
Online ISSN : 2189-0803
ISSN-L : 2189-0803
54.1.2
Session ID : 31a-ZA-4
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31a-ZA-4 Residual defects in rapid thermal annealed As-implanted Si
Y Kikuchi, F Uesugi, K Watanabe, H Nagaeda, M Kase, I Hashimoto
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© 1999 The Physical Society of Japan
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