Meeting Abstracts of the Physical Society of Japan
Online ISSN : 2189-0803
ISSN-L : 2189-0803
55.2.4
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Defect study on Si implanted with B and BF_2 ions by coincidence Doppler broadening measurements
T. Akahane, M. Fujinami, K. Ohnishi, T. Sawada
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CONFERENCE PROCEEDINGS FREE ACCESS

Pages 859-

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© 2000 The Physical Society of Japan
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Meeting Abstracts of the Physical Society of Japan

Meeting Abstracts of the Physical Society of Japan

Meeting Abstracts of the Physical Society of Japan

Meeting Abstracts of the Physical Society of Japan

Meeting Abstracts of the Physical Society of Japan

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