Meeting Abstracts of the Physical Society of Japan
Online ISSN : 2189-0803
ISSN-L : 2189-0803
56.2.4
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Molecular Design of PDECB Source Materials to Produce a Beam of Neutral Free Radicals for Thin Film Growth
T. KanayamaS. SunouchiT. ShimizuK. Hayashi
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Pages 725-

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© 2001 The Physical Society of Japan
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