Meeting Abstracts of the Physical Society of Japan
Online ISSN : 2189-0803
ISSN-L : 2189-0803
58.1.2
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Properties of Radio-Frequency Discharge Plasma with Phased Helical Antennas
G. Sato, W. Oohara, H. Ishida, R. Hatakeyama
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CONFERENCE PROCEEDINGS FREE ACCESS

Pages 240-

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© 2003 The Physical Society of Japan
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