Meeting Abstracts of the Physical Society of Japan
Online ISSN : 2189-0803
ISSN-L : 2189-0803
60.2.2
Session ID : 19aYA-2
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19aYA-2 Si^<2+> and Si^+ sputtering yields from Si(1 1 1) surface bombarded by noble gas particles
Y. Sakuma, M. Kato, S. Yagi, K. Soda
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© 2005 The Physical Society of Japan
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