Meeting Abstracts of the Physical Society of Japan
Online ISSN : 2189-0803
ISSN-L : 2189-0803
65.1.2
Session ID : 20aTC-1
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20aTC-1 The possibility to control the lateral straggling of dopants implanted using molecular beam
S. T. NakagawaT. SakaiH. KandaG. Betz
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© 2010 The Physical Society of Japan
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