Meeting Abstracts of the Physical Society of Japan
Online ISSN : 2189-0803
ISSN-L : 2189-0803
68.1.2
Session ID : 27pEG-5
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27pEG-5 HAADF-STEM observation of ion tracks in amorphous Si_3N_4 thin film
Y. Morita, K. Nakajima, M. Suzuki, K. Kimura, K. Narumi, Y. Saitoh, M. Tsujimoto, S. Isoda
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