Meeting Abstracts of the Physical Society of Japan
Online ISSN : 2189-0803
ISSN-L : 2189-0803
69.1.4
Session ID : 28pPSA-52
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28pPSA-52 First-Principles Study on atomic structure and oxygen vacancy of HfO_2/SiO_2/Si Interfaces
Yoshifumi Matsuoka, Takashi Kojima, Tomoya Ono
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