Meeting Abstracts of the Physical Society of Japan
Online ISSN : 2189-0803
ISSN-L : 2189-0803
69.2.4
Session ID : 10aAE-9
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10aAE-9 Anneal-induced strain in SiC wafers implanted at low-temperatures
K. Ishiji, S. Kawado, Y. Hirai, S. Nagamachi
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Meeting Abstracts of the Physical Society of Japan

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Meeting Abstracts of the Physical Society of Japan

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