Meeting Abstracts of the Physical Society of Japan
Online ISSN : 2433-1112
50.4
Session ID : 28p-YT-2
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Species of Radicals, Positive and Negative Ions in SF_6RF Discharge
K. Nagaseki, I. Ishikawa, E. Nishimura, Y. Saito, S. Suganomata
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© 1995 The Physical Society of Japan
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