Meeting Abstracts of the Physical Society of Japan
Online ISSN : 2433-1171
1995.2
Session ID : 27a-N-3
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27a-N-3 Detection of self-interstitial atoms in CZ-silicon utilizing oxygen precipitation
Y. Satoh, H. Furuya, M. Kadoi, Y. Shimanuki
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© 1995 The Physical Society of Japan
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