Meeting Abstracts of the Physical Society of Japan
Online ISSN : 2433-118X
1992.4
Session ID : 26p-E-9
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26p-E-9 Mass Spectrometric Observation of 13.56MHz RF Discharge in SF_6 Gas
K Nagaseki, I Ishikawa, E Nishimura, Y Saito, S Suganomata
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© 1992 The Physical Society of Japan
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