Lα X-Ray Emission Spectra of Ge, GeO_2, GaP, GaAs and Ga_2O_3

Abstract

With a high-resolution two-crystal vacuum spectrometerequipped with beryl crystals, the Ge Lα emission and Ga Lα emission spectra in fluorescencehave been measured for Ge, GeO_2, GaP, GaAs and Ga_2O_3. The measuredLα emission spectra consist of a prominent peak Lα_{1, 2}and its high-energy structure, and are slightly influenced by chemicalbonding. The Lα emission spectrum of Ge is compared with availablemultiplet calculations for Ge Lα_{1, 2} satellites. Thehigh-energy structure is primarily attributed tothe satellites as a result of multiple ionizations.