Analyses of Spatially Resolved Electron Energy Distribution and Transport Properties in Steady State in CF₄

Abstract

Under homogeneous electrostatic field in gas between two plane electrodes, the electron energy distribution and transport properties near the electrodes are usually position dependent. Boltzmann equation analyses for such position dependent energy distribution and transport properties in steady state are very few due to its difficulty. In this paper, position dependent electron behaviors in CF₄ calculated using the Steady State Townsend flight time integral method (SST-FTI) for several boundary conditions are presented with the theory of the SST-FTI.