Abstract
Anomalous enhancement of light emission from a Si(001) vicinal surface induced by Au adsorption was observed using a light detecting system combined with a transmission electron microscope. The Si(001) vicinal surface was separated into Si(001)5×3.2–Au terraces and Si(119)“8×2”–Au facets by Au adsorption. It was found that the electron-beam-induced light emission is highly polarized due to anisotropy of the surface structure. The emission intensity from the Si(001)–Au terrace is enhanced for the s-polarized direction parallel to the surface steps in the wavelength range of 270–450 nm, and reduced for the p-polarized direction. This result indicates that the Au adsorption on the Si(001) vicinal surface modifies the optical properties of the materials (in the present case Si), suggesting the formation of a new material phase on the surface.