Microwave Generation of Harmonics in Plasma Resonance

Abstract

By taking account of plasma oscillations and a spatial variation of electron density and solving the nonlinear Boltzmann and the Poisson equations by the perturbation method, the harmonic components of the distribution function of electrons, the intensity of inner electric field of plasma and the discharge current density are found in the case of plasma resonance. Then a harmonic power conversion ratio is derived and compared with experiments. Finally, the effect of the velocity dependence of collision frequency on the harmonic power is discussed.