A Study on Diffusion Pump Oil by the Mass Spectrometer and the Gas Analysis of the Final Vacuum

Abstract

Diffusion pump oil is analysed by the mass spectrometer, especially for the purpose of obtaining some knowledge about the residual gases at the final vacuum when we use oil diffusion pumps. As a sample, we take alkyl-naphtalene and its spectrum is given graphically. The results of our analyses of residual gases confirm the conclusions obtained by Hickman and Blears.