High-Speed and Large-Amplitude Resonant Varifocal Mirror

Abstract

We design, fabricate, and measure high-speed resonant varifocal mirrors for a reflective type focus scanning optical element. A circumference supported type mirror and a node supported type mirror with a 1 mm diameter driven by an electrostatic actuator are investigated. In the node supported type, a larger amplitude compared to that of the circumference supported type was obtained. The fabricated mirror could operate at approximately 450 kHz with axisymmetric deformation. The focal length was calculated to be ±28 mm at an applied total voltage amplitude of 150 V.