An Improved Backscattering Correction Equation for Wide Analytical Conditions on Quantitative Auger Analysis

Abstract

  We have described the electron backscattering correction for Auger analysis. Ichimura-Shimizu equation has been frequently used for this correction, but has limitations for incident electron energies and angles. Then, we have proposed an improved correction for the backscattering correction that could be applied to the wide analytical conditions based on the Ichimura-Shimizu equation.