Introduction to Electron Optics

for the Study of Energy Analyzing Systems (13)

Abstract

  This final chapter describes several aspects of electron optics and its application to electon spectroscopy. An energy-filtering imaging system is presented in the first section. Such a system is realized by incorporating an energy analyzer in a conventional electron microscope, but some crucial optical conditions are required as compared with those in a spectrometer or microscope. Next theme is the equivalence of the optical systems of TEM, SEM, and STEM, which is shown by the theorem of reciprocity. The last section introduces several techniques of numerical calculation for the design of electron optical systems.