Developments and Prospects of AES and XPS Instruments

Abstract

  AES and XPS have been widely utilized for surface analysis of steel products, automobile parts, semiconductors, new materials, and so on. These products and materials have become microscopic in many years, and/therefore AES and XPS instruments have also been developed with the improvement of spatial resolution. In this article, the progress of AES and XPS instruments is reviewed mainly focused for spatial resolution and future directions is briefly discussed.