Abstract
To evaluate the present errors in the calibration of the mass scale of time-of-flight secondary ion mass spectrometry (ToF-SIMS) in the practical field of Japanese industries, ToF-SIMS Working Group (WG) of Surface Analysis Society of Japan (SASJ) conducted the inter-laboratory studies among 14 instruments in 2007, 2008 and 2009. There was significant scatter over 200 ppm in the relative mass accuracy at the first inter-laboratory test in 2007. Clearly, this is poor compared with the requirement for identification. However, the great deviation in the mass accuracy has been dramatically decreased at the second and third inter-laboratory tests by the accumulating knowledge through the discussion among the WG. Based on the results obtained, a practical guide to analysts for mass scale calibration will be provided in near future.
