Development of Laser-Assisted Wide Angle 3D Atom Probe

Yuya Hanaoka; Norihito Mayama; Tetsuo Terakawa; Takuya Yamamoto; Yasuko Kajiwara; Tatsuo Iwata; Masahiro Taniguchi; Masanori Owari

doi:10.1384/jsa.17.237

Novel techniques and instrumentations

Development of Laser-Assisted Wide Angle 3D Atom Probe

Yuya Hanaoka , Norihito Mayama, Tetsuo Terakawa, Takuya Yamamoto, Yasuko Kajiwara, Tatsuo Iwata, Masahiro Taniguchi, Masanori Owari

Author information

Yuya Hanaoka Corresponding author
Institute of Industrial Science, The University of Tokyo
Norihito Mayama
Institute of Industrial Science, The University of Tokyo
Tetsuo Terakawa
Institute of Industrial Science, The University of Tokyo
Takuya Yamamoto
Institute of Industrial Science, The University of Tokyo
Yasuko Kajiwara
Institute of Industrial Science, The University of Tokyo
Tatsuo Iwata
Department of Electrical and Electronic Engineering, Mie University
Masahiro Taniguchi
Division of Applied Chemistry, Department of Bioengineering and Chemistry, Kanazawa Institute of Technology
Masanori Owari
Institute of Industrial Science, The University of Tokyo
Environmental Science Center, The University of Tokyo

JOURNAL FREE ACCESS

2011 Volume 17 Issue 3 Pages 237-240

DOI https://doi.org/10.1384/jsa.17.237

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Abstract

Laser-assisted wide angle three dimensional atom probe (3DAP) has been developed in our laboratory [1]. In this study, in order to reconstruct three dimensional arrangement of atoms in more detail, the cryogenerator and field ion microscope (FIM) were installed in our 3DAP instrument, and our original preset-type specimen stage was improved. By analyzing the pure tungsten specimen with our improved 3DAP instrument, the improvement of the mass resolution and sharpening of the desorption and tomographic images were attained. Then, it was confirmed that the rising of the temperature by the laser irradiation might be suppressed by cooling down the specimen under 100 K.

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