Abstract
We have developed a compact sample transfer vessel. It consists of coaxial type linear motion feedthrough, vacuum vessel and sample catcher. The sample can be analyzed by using this system without exposing to atmosphere. The vessel pressure reached ∼ 4.6 × 10-4 Pa and kept 1 × 10-3 Pa for 20 days. The aluminum on which an argon sputtering was carried out was kept in this equipment for 41 hours. Then, ∼ 1.0 nm thick oxide film was formed on the surfaces. The oxide film thickness was about 1 ⁄ 4 of the natural oxide layer thickness.
