Abstract
Before the 1990s, almost all data taken on surface analysis instruments were processed with computers attached to the analytical instruments, and the data structure were different each other. Therefore, it was impossible to share spectral data. However, it was recognized that the information on spectral data should be stored in the common structure, and used widely. Based on this request, ISO TC201 published ISO 14976 Data transfer format, ISO14975 Information formats and ISO 22048 Information format for static secondary-ion mass spectrometry. In this paper, the process of publications, introduction and usage of these standards are explained, and the future of data formats is discussed.
