Journal of Surface Analysis
Online ISSN : 1347-8400
Print ISSN : 1341-1756
ISSN-L : 1341-1756
Review
Bonding State Analysis of DLC by Using Reflective EELS
Mitsutoshi Yokomizo
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JOURNAL FREE ACCESS

2013 Volume 20 Issue 1 Pages 18-24

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Abstract
In this review, the principle of EELS is described, which is one of the most effective techniques to evaluate bonding states of carbon. Evaluation of DLC film using Reflective EELS is also given details.
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© 2013 by The Surface Analysis Society of Japan
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