Abstract
We report here the Auger electron spectroscopy (AES) of insulators using graphene as a conductive layer. For the AES of insulators, it is necessary to give conductivity to the insulator surfaces by coating with conducting thin membranes in general. We focused on graphene properties such as high electrical conductivity and one-atomic thickness, and applied graphene as the conductive layer. As a result, high insulating particles were measured by the AES with graphene in the first time. The single layer graphene was deposited on arbitrary substrates and behaved as an ideal conductive layer for the AES analysis.
