Analysis of the Shape of Cross Sections Developed under Shave-off Condition Sputtering

Abstract

Shave-off method has been proven its efficacy for highly precise depth profiling in secondary ion mass spectrometry (SIMS) analysis. The unique technique, shave-off method has distinctive cross-sectional shape after scanning compared with raster scan method. We investigated the cross sectional shape of three different height tungsten samples using focused ion beam scanning electron microscopes (FIB-SEM) and transmission electron microscope (TEM). Though it is a simple cross-sectional shape, the analysis results enable the investigation of an angle between primary ion beam and sample surface, and sputtering yield.