Abstract
The electronic states of indium zinc oxide (In-Zn-O: IZO), one of the transparent conductive oxides, were evaluated by x-ray photoelectron spectroscopy (XPS) and reflected electron energy loss spectroscopy (REELS). The carrier densities of the IZO films depending on the amount of oxygen vacancies are widely controlled by the oxygen flow ratios in the film deposition. In this study, we systematically investigated the relationship between the carrier densities and the electronic states of the IZO films.
