Elastic scattering effects in quantitative AES and XPS: Case studies

Abstract

Advanced theoretical models of photoelectron and Auger electron transport are typically implemented in Monte Carlo algorithms simulating multiple interactions of signal electrons in a solid. However, much effort has been devoted to develop analytical theoretical models describing electron transport with comparable accuracy. In this review, a critical analysis of these theories is presented. The second issue addressed here is the role of elastic scattering events in quantification of HAXPES analyses performed with the use of polarized radiation.