Abstract
Many applications of x-ray fluorescence (XRF) analysis have been reported in various fields, such as in the environmental, archeological, biological, and forensic sciences as well as in industry. Elemental analysis near surface region is performed by XRF. Advanced x-ray focusing optics such as polycapillary optics enables a micro x-ray beam with a laboratory x-ray source, leading to micro-XRF analysis and scanning-mode XRF imaging. A confocal micro-XRF technique has been applied for the visualization of elemental distributions inside the samples. In parallel, the authors have studied a wavelength dispersive XRF (WDXRF) imaging spectrometer for a fast elemental imaging. A full-field energy dispersive X-ray fluorescence (FF-EDXRF) imaging spectrometer using single photon counting analysis with x-ray camera was also studied. We evaluated and discussed the performance of laboratory-made these scanning- and FF- imaging spectrometers concerning energy resolution, spatial resolution, quantitative performance and elemental imaging. At the end, compressed sensing which is one of general information processing technique was applied for high-resolution XRF images.
