Journal of Surface Analysis
Online ISSN : 1347-8400
Print ISSN : 1341-1756
ISSN-L : 1341-1756
Extended Abstracts from 8th International Symposium on Practical Surface Analysis (PSA19)
Developments in Practical Applications of Inelastic Background Analysis to Characterize nano-structures
Sven Tougaard
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2019 Volume 26 Issue 2 Pages 124-125

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Abstract

Recent advances in practical applications and software for non-destructive characterization of nano-structures by analysis of the inelastic background in photoelectron spectroscopy are discussed.

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© 2019 by The Surface Analysis Society of Japan
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