A Multi-Technique Approach for a Complete Thin Film Characterisation

N. Gerrard; J. Counsell; A. Roberts; C. Blomfield; C. Moffitt; T. Conard

doi:10.1384/jsa.26.184

Extended Abstracts from 8th International Symposium on Practical Surface Analysis (PSA19)

A Multi-Technique Approach for a Complete Thin Film Characterisation

N. Gerrard, J. Counsell, A. Roberts, C. Blomfield, C. Moffitt, T. Conard

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JOURNAL FREE ACCESS

2019 Volume 26 Issue 2 Pages 184-185

DOI https://doi.org/10.1384/jsa.26.184

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Abstract

Here we provide an overview of a multi-technique investigation of layered thin film and ultra-thin film coatings. Surface sensitive analytical techniques are chosen for their different sampling depths and include a combination of conventional Al Kα and higher photon energy Ag Lα excited XPS, angle resolved X-ray photoelectron spectroscopy (ARXPS) with maximum entropy method (MEM) reconstruction of concentration depth profiles and argon cluster depth profiling.

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