Journal of Surface Analysis
Online ISSN : 1347-8400
Print ISSN : 1341-1756
ISSN-L : 1341-1756
Collection for Dr. Seah´s Works Contributed to JSA
New Aspects in Quantitative Surface Analysis
M. P. Seah
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2022 Volume 28 Issue 3 Pages S4-S8

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Abstract
The development and analysis of data bases of traceable AES and XPS reference spectra are described. The spectra have all instrumental terms calibrated and removed except the X-ray photon flux density. Auger electron intensities, in terms of the electrons emitted per steradian per incident electron for ionisation of a given shell, correlate with theory with a mean error of a factor of 1.04 with no independent fitting parameters. Correlations for 3 ≤ Z ≤ 83 show that, for AES, Casnati et al´s cross section for ionisation is significantly better than Gryzinski´s. For inelastic mean free paths the equation TPP-2M, of Tanuma et al, is used with a cut-off for the valence electrons at 14 eV binding energy and with all 4f electrons excluded for the lanthanide metals. Correlations of experiment and theory for the data sets are now excellent. For AES a new method of using broadened differential spectra shows accuracies approaching full peak area analysis. This method has promise as a simple method for analytical use.
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© 2022 by The Surface Analysis Society of Japan
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