Journal of Surface Analysis
Online ISSN : 1347-8400
Print ISSN : 1341-1756
ISSN-L : 1341-1756
Poster Abstract
Analysis of interface after in-situ heat treatment of Al stacking AZO thin films for low resistivity
Naoya Koga, Hisao Makino
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2023 Volume 29 Issue 3 Pages 202

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