Journal of Surface Analysis
Online ISSN : 1347-8400
Print ISSN : 1341-1756
ISSN-L : 1341-1756
Serial Lecture
How is the Signal Attenuation in Surface Electron Spectroscopy Described? V. Description of Electron Inelastic Scattering Cross Sections for Solid Using Dielectric Function
Shigeo Tanuma
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2023 Volume 30 Issue 1 Pages 2-14

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Abstract

The author described the inelastic scattering cross section of electrons in matter using the Born approximation, generalized oscillator strength, and dielectric function as key parameters. With Born approximation, the electron inelastic scattering cross section in atom can be expressed using the generalized oscillator strength distribution. On the other hand, in dielectric response theory, the inelastic scattering cross section in a solid sample can be expressed in terms of the energy-loss function. Comparing these two equations, the generalized oscillator strength distribution can be expressed in terms of the energy loss function within the range where the dipole approximation is valid. This makes it possible to use the energy loss function to calculate the inelastic scattering cross section in solids in a practical and simple manner. Furthermore, the author shows that from this relationship, it is possible to calculate the squares of the dipole matrix elements of the total inelastic scattering and the static scattering factor.

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© 2023 by The Surface Analysis Society of Japan
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