The Development of the Angle Resolved XPS Equipment at SPring-8 BL15XU

Abstract

The 3rd generation synchrotron radiation (SR) facilities have been recently built and have given us high flux and wide-energy tunable X-ray. This characteristic is useful to obtain XPS spectra excited by the high energy X-ray, which reveals the deeper layers. In this work, we used the beamline of SPring-8 BL15XU which has an revolver type undulator and a double crystal tandem monochromator and the angle-resolved XPS machine where an energy resolution is good even if X-ray energy is high up to 4500eV. For multilayers of the magnetic tunnel junction device, XPS measurement using 3000eV X-ray led to evaluate the deeper layers of a specimen and revealed the interface between Al oxide and Fe₅₀Co₅₀ alloy with Ta oxide or carbon protective overlayers.