Journal of the Japan Society of Applied Electromagnetics and Mechanics
Online ISSN : 2187-9257
Print ISSN : 0919-4452
ISSN-L : 0919-4452
Special Topic I : Development Technology of Next Generation Applied Electromagnetic Machinery IV
Development of a High Performance Linear Synchronous Motor for Improvement of Processing Capacity of Semiconductor Process Equipment
Atsushi IKARIGAAkira GOTOTakuya OKAMOTO
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2013 Volume 21 Issue 4 Pages 536-541

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Abstract
 Linear motors can achieve much higher speed, quicker response, and more accurate positioning than ball screws. To achieve higher response in the linear motor positioning systems, force density and power rate in the linear motor characteristics must be improved. Therefore, it is important to know how to increase the magnetic and electric loading for the downsizing design of electrical machines. We have been studying high-density machine designing since we proposed a permanent magnet mover utilizing the magnetic flux concentration type surface permanent magnet array (CSPM array) for linear synchronous motors. To improve the linear motor performance utilizing the CSPM array, we have employed a CSPM array combined with the electrical steel sheets in mover and optimized the construction by means of the three-dimensional finite element method. This paper presents that the prototype model has a higher potential for use in the linear motor positioning systems.
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© 2013 The Japan Society of Applied Electromagnetics and Mechanics
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